MIMO control structure solution for Planar X/Y systems
- Semiconductor manufacturing (OLED, LCD, FPD)
- Inspection and scanning systems
- Pick and place machines
- 2-dimensional stages Drive tuning
Planar X/Y stages provide outstanding precision and planar flatness. They are used in a growing variety of applications in semiconductor manufacturing and general industry.
Advanced Planar X/Y systems use special control structures based on multi-input multi-output (MIMO) algorithms, supporting very complex motions. These systems must be capable of fast communications, dynamic error correction, and also be able to work in a network.
Elmo provides a highly efficient, Master-Slave MIMO configuration for Planar X/Y. It can be implemented either as a standalone or a distributed network motion control solution. Elmo’s control structure uses a standard configuration control loop, making it simpler to implement than other Planar X/Y systems.
Elmo’s implementation also simplifies drive configuration and tuning as well as cabling requirements.
Elmo provides an advanced MIMO-based motion control solution for both Gantry and Planar X/Y systems.
Elmo Application Study: MIMO-Based Motion Control for Planar XY